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We are also applying alternative techniques and develop novel processes to achieve more economic and higher quality microstructures. Examples of alternative methods include the substitution of lasers by excimer lamps, the replacement of “serial” laser machining by “parallel” reactive ion etching (RIE) and MO-CVD for thin film deposition. One important aspect of our work is the development of new materials for laser applications, and to apply our method to prepare materials, especially in the form of thin films, which exhibit special (new) properties. The thin films are mainly produced by pulsed laser deposition (PLD), which gives a high control over film composition and properties. The thin films can for example be applied as model systems in renewable energy sources (as catalysts, electrodes etc.).
Laser Methods and alternatives:
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