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Lasers can be used to directly structure a wide range of materials, if the right wavelength and power-density is used. Due to the high cost of laser photons, it might be more effective to use a combination of laser structuring and alternative methods (e.g. reactive ion etching).
If the target materials is transparent for the selected wavelength, indirect structuring methods (such as laser induced backside wet etching) have to be used. |
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