Contributions (4 lectures about Vacuum thin film deposition techniques and Thin film industrial applications) to the lecture:

Inorganic Thin Films: Processing, Properties and Applications (327-2104-00) by L. Gauckler, J. Rupp, A. Bieberle (Department of Materials).

PD Dr. Thomas Lippert

Vorlesung f�r h�here Semester in den Studieng�ngen:

Chemie und Chemieingenieurwissenschaften

Thomas Lippert

We 10 - 12 Uhr
Room HCl D 2

The lecture is given every wintersemester and will be given in German or English
2 credit points can be obtained

Content
Lasers: History and Introduction	Laser Ablation: Dry Etching
Micro- and Nanotechnology	Laser Ablation of Polymers
Lithography	Laser Ablation of Designed Polymers
Non-optical Lithography and Photoresists	Laser-spectroscopy
Laser-cutting and Laser-welding	Laser and Surfaces
Laser-drilling	Thin Films: Characterization and Deposition by Pulsed Laser Deposition (PLD) and L-CVD
Laser-cleaning